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Epitaxy

Epitaxy is primarily used in semiconductor fabrication and nanotechnology. Plustherm induction generators can heat these materials in a uniform manner thereby guaranteeing correct growth of the crystalline layers on the substrate.

Plustherm induction heating systems are used for experimental and production applications.

Main advantage of induction heating:
- Rapid operational readiness
- More ecological than conventional methods
- Precise temperature control
- High reproducibility

Accessories:
-Pyrometer (0-3000°C)
-SPS/PLC connection
-Cooling unit
-Data interface
-Professional training
-On site installation and commissioning by a Plustherm technician
-Stepped-resonant circuit up to 30m distance between the generator and heating location